Introduction of Spatial Light Modulator SLM Based on Digital Micro Mirror

doi:10.3969/j.issn.1673-8578.2014.zk1.028

Abstract

Abstract: SLM (spatial light modulator) is a kind of devices which can upload information to an optical data field, therefore modulating the light intensity of each point of the 2-dimentional space. It is widely used in the field of microlithography. As for the high demand for the accuracy of illumination intensity and uniformity etc. of the microlithography technology, SLM based on DMD(digital micro mirror) is welcomed because of its high accuracy and controllability, therefore becoming essential part of microlithography system.

Key words: SLM, DMD, microlithography

CLC Number: (术语规范及交流)

DU Shuya. Introduction of Spatial Light Modulator SLM Based on Digital Micro Mirror[J]. China Terminology, 2014, 16(zk1): 72-74.

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Introduction of Spatial Light Modulator SLM Based on Digital Micro Mirror

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